MNMS Cleanroom | Micro-Nano-Mechanical Systems Cleanroom Laboratory | Illinois
MNMS Cleanroom
Lithography side
Wet benches and photolithography under filtered light
Expose
Contact lithography up to 0.5um resolution
MNMS Cleanroom
Photolithography in Class100 Cleanroom
About the Micro-Nano-Mechanical Systems Cleanroom Laboratory
The Micro-Nano-Mechanical Systems Cleanroom Laboratory within the Department of Mechanical Science and Engineering at the University of Illinois provides an opportunity for research and discovery that is otherwise unattainable in a typical laboratory setting. If you have any questions or concerns, please email the MNMS Director (
mnms-director@illinois.edu
).
To request staff assisted Cleanroom services and research, contact Sr Research Engineer, Joe Maduzia, at
jmaduzi2@illinois.edu
or 217-244-6302.
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Description of Services
MNMS Cleanroom Staff are available for device fabrication research and development. This can include fabrication approach suggestions, or direct manufacturing and testing. The majority of fabrication done by Staff is done using MNMS Cleanroom Equipment, however the Staff will use other equipment on campus as necessary.
Description of Facilities
The Micro-Nano Mechanical Systems (MNMS) Laboratory is a 3800 sq. ft suite of labs and related support rooms, including 3 cleanroom laboratories for research in the design and fabrication of small-scale mechanical systems. The lab supports research and instruction in the general area of micro- and nano-electro-mechanical systems (MEMS & NEMS), and nano-chemical-electrical-mechanical-manufacturing systems (Nano-CEMMS). The current focus is on devices employing nano-to-microscale mechanisms and the integration of these mechanisms into meso-scale devices.
The MNMS laboratory has class 1000, 100 and 10 cleanrooms for the microfabrication, inspection, and testing of devices. The cleanrooms house a range of state-of-the-art equipment including:
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Equipment
Lithography
Flood Exposure - ABM Model 60
Fume Hood - Hot Plate Bench
Fume Hood - Laminar Flow Spinner Bench
Mask Aligner - EV620
Mask Aligner - EVG 420
Mask Aligner - Karl Suss MJB3
Microlight 3D - Maskless Aligner and Exposure Tool
Spinner - High Speed
Etching
ICP DRIE - STS Pegasus
ICP DRIE - Plasmatherm
KOH Etching Station
RIE - Axic
RIE - March Jupiter III
Deposition
Evaporator - Thermionics 4-Pocket E-beam Evaporator
High Temperature Furnace
Molecular Vapor Deposition (MVD) System
Sputterer - AJA 8-Gun DC Metal Sputtering System
Sputterer - Confocal 3-Gun RF and Pulsed-DC Dielectric
Analysis
AFM (Dimension 3000)
Goniometer - KSV CAM200
Microscope - Leica DMIRE
Microscope - Near IR Imaging
Microscope - Olympus Optical Wafer Inspection
Probe Station
Profilometer - KLA-TENCOR Alpha D500
SEM - Hitachi S-2250N
SEM - Hitachi S570
SEM - Oxford INCA EDS Detector on Hitachi S-2250N
Vibrometer
General
Bonder - EVG 501 Wafer Bonding System
Carrier Wafer Mounting Chuck
Cleaving tool by LatticeGear
Dicing Saw
Electroplating Station
Fume Hood - Acid - Hydrofluoric Acid Use
Fume Hood - Prep Room
Glovebox
Lapping System
Oven - Curing Oven
Oven - Vacuum Annealer
Oven - Vacuum Oven
Sonic Mill
Spinner (Left)
Spinner (Right)
Supercritical Point Dryer
Tube Furnace - Anneal Tube
Tube Furnace - Boron Tube
Tube Furnace - Dirty Tube
Tube Furnace - Oxidation Tube
Tube Furnace - Phosphorus Tube
Ultrasonic Cleaner
University of Illinois Designed Equipment
5 Axis Stage E-Jet
Transfer Printer - Large
Transfer Printer - Laser
In addition to the cleanroom laboratories, the MNMS laboratory has a preparation room for lapping, dicing, ultrasonic milling, and sample preparation. A chemical fume hood and Scanning Electron Microscope (SEM) are also available.
MNMS Cleanroom Contacts
General Inquires:
Joe Maduzia
(217) 244-6302
jmaduzi2@illinois.edu
MNMS Cleanroom
2208 Sidney Lu Mechanical Engineering Building
1206 W Green St
Urbana, IL 61801